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On Demand Webinar
Supply Chain as an Accelerator for Semiconductor Industry Growth
Entegris is offering a free on demand webinar
Join Sandy Gauthier, vice president of global supply chain as she discusses reassessing risk and investing for the future to not only navigate current challenges but emerge with a more robust supply chain for the decade ahead. This presentation is followed by live Q&A.
Access Related On Demand Webinars:
Addressing EUV’s Greatest Challenges: Stochastic Defects and High NA Enablement
In this webinar, we will discuss the latest technology developments related to EUV implementation, mitigation strategies to address both stochastic defects as well as conventional sources of variability, and what is needed to enable high NA and the implications to the scaling roadmap.
EUV Enablement: Solving Defect Challenges in the EUV Process
In this webinar, Entegris' Dr. Wenge Yang discusses the latest technology developments related to EUV implementation and how to reduce defectivity and variability challenges in the EUV process.
Contamination Control Essentials – Liquid Filtration
In this webinar, Tony Ozzello, Staff Field Engineer at Entegris, Inc. in the Microcontamination Control Division, presents an overview of liquid filter mechanisms, materials, and characteristics. Understanding each is essential to developing effective strategies to achieve your material purity goals. A Q&A session follows the presentation.
A New Collaborative Approach to Defectivity Challenges in the Automotive Industry
Join Antoine Amade, EMEA/NA senior director – Entegris Automotive Program, in this recorded webinar as he explores the ‘New Collaborative Approach’, a new model of engagement targeting contamination control to improve automotive defectivity and reliability.
Materials Innovation: Holistic Solutions for Improved Yield and Reliability
Learn about:
- Digital transformation and the demand for higher performance chips
- New, purer materials needed to deliver high-yield and long-term reliability
- Holistic materials and handling solutions to enable a new approach to the most challenging yield problems of advanced node technologies.
ESD Challenges in Fluid Handling Systems: A Shock to the System
- Why is the industry moving away from stainless steel to PFA materials for transporting process fluids?
- How can you defend against dangerous ESD in fluid handling systems?
Join Dave Kemkes, Senior Product Marketing Manager, and Rick Lindblom, Director of Product Marketing Fluid Handling, as they discuss these topics and introduce Entegris’ new ESD solutions.
The Lithographer's Toolkit
Jennifer Braggin, Strategic Applications Technologist at Entegris, highlights points in the photochemical ecosystem where variability can be addressed with chemistry and hardware solutions - from the purification of resist components to the final post develop rinse, there are many points at which defects can be created or eliminated.
Protecting Plasma Chamber Parts and Components with Advanced Coatings
Connor Gallegos, Product Manager, and Nilesh Gunda, Director, Coatings Product Technology, share the importance of advanced coatings for chamber parts and components, and highlight three successful coating methods.
Advanced CMP of Silicon Carbide for EVs and Power ICs
In this webinar, Fadi Coder, director, global applications will address the challenges specific to SiC polishing process, slurry performance improvement to address new technical challenges, and the benefits of offering an encompassing synergetic solution to improve yield.
Technical Resources
Access Featured Content
Major fabs understand the need for complete solutions that improve yield in all aspects of the CMP process. Shrinking feature size, along with the need for tighter defectivity and particle control in the CMP slurry is driving innovative changes in filtration and monitoring systems. We are in the position to offer single source solutions and eliminate introducing unnecessary contamination risk from incompatible chemicals or consumables.
Dual containment tubing (DCT) installs easily in areas that are densely populated with other facility plumbing or infrastructure where it is difficult to route rigid PVC containment pipe. Because it is self-contained on large reels that pay out a continuous feed, the tubing can be rapidly routed from the starting point, throughout the facility and around existing infrastructure. The result is a safe, reliable DCT system that can be installed or retrofitted in mere hours instead of days.
Our trays are used in a growing number of industries and environments to securely manage small parts inventory. The device trays are designed and manufactured to interface with manual or automated tool handling. Our designs allow reliable operation and superior device protection while minimizing shipping and storage costs.
Logic devices are getting smaller, and the introduction of 3D architectures that use vertical fins and nanowires in their gate design introduce more complexity to the fabrication process.
As the automotive paradigm shifts from mechanical to electronic-centric vehicles, carmakers must now meet parts per billion (ppb) failure rates. To achieve these goals and improve long-term reliability, they look to semiconductor manufacturers and the automotive component supply chain to collaborate in meeting these goals and assure the functional safety of new modes of transportation.
As process nodes continue to shrink to 5 nm and features become more complex — pushing the manufacturing challenges of chip designs to new limits — the sensitivity to contamination during manufacturing processes has increased significantly. To meet the needs of these applications, gas purity must extend through the full supply chain to prevent process excursions and improve device performance and reliability.
We’re debunking the contamination control myths to reduce your process variations. The lithographer’s toolkit provides a practical guide to reduce process variations that threaten your semiconductor fab performance.
Entegris' customized silicon carbide (SiC) slurry enables specialized CMP processes to cost effectively meet the automotive industry demands for higher operating voltages.
Through close collaboration with chip and tool manufacturers, we develop and test candidate precursors for the next generation films, devices, and process requirements. Film and process viability is demonstrated using in-house ALD and CVD tools.
As logic devices go to smaller line widths, 3D NAND architectures increase layers, and DRAM memory density increases, sensitivity to contamination and defects have a greater impact on device performance. To achieve optimum wafer yield and reliability, the microelectronics industry needs to address the increased materials consumption requirements and material purity challenges from chemical manufacture to point of use.
Extreme Ultraviolet reticle pods are highly-specialized pieces of equipment that fulfill a critical role in EUV lithography. They must protect the reticle during use, storage, and transportation while not introducing additional contamination or damage.
Protecting the purity, safety, and security of the wafers is paramount to your business.
Fortunately for semiconductor manufacturers, Entegris provides full container solutions to monitor, protect, transport, and deliver those valuable wafers from the front-end through to the back-end of the fab.
To mitigate the increased risks of ESD, we are developing a continuously conductive PFA system that collects the charge buildup from the media and the fluid handling system and allows an uninterrupted dissipation path to ground.
Learn the growing importance of process gas purification in manufacturing geometrically complex semiconductor devices and how advanced purification can address multiple trace contaminants in the gas supply to achieve and maintain the purity baseline.
Learn more about why we must think of defectivity as pervasive and why coordinated thinking across the value chain is needed to handle it.